Publication:
Atomic Hydrogen Exposure to Enable High-Quality Low-Temperature SiO2 with Excellent pMOS NBTI Reliability Compatible with 3D Sequential Tier Stacking
Loading...
Journal
Abstract
Description
Metrics
Downloads
276 since deposited on 2021-12-06
45last month
2last week
Acq. date: 2025-12-08
Views
2088 since deposited on 2021-12-06
2last month
2last week
Acq. date: 2025-12-08
Citations
Metrics
Downloads
276 since deposited on 2021-12-06
45last month
2last week
Acq. date: 2025-12-08
Views
2088 since deposited on 2021-12-06
2last month
2last week
Acq. date: 2025-12-08
Citations