Publication:
Atomic Hydrogen Exposure to Enable High-Quality Low-Temperature SiO2 with Excellent pMOS NBTI Reliability Compatible with 3D Sequential Tier Stacking
Loading...
Journal
Abstract
Description
Metrics
Downloads
336 since deposited on 2021-12-06
57last month
9last week
Acq. date: 2026-01-09
Views
2090 since deposited on 2021-12-06
2last month
1last week
Acq. date: 2026-01-09
Citations
Metrics
Downloads
336 since deposited on 2021-12-06
57last month
9last week
Acq. date: 2026-01-09
Views
2090 since deposited on 2021-12-06
2last month
1last week
Acq. date: 2026-01-09
Citations