Exploring GAA-Nanosheet, Forksheet and GAA-Forksheet Architectures: A TCAD-DTCO Study at 90 nm and 120-nm Cell Height

Gaddemane, Gautam; Schuddinck, Pieter; Bhuwalka, Krishna; Rzepa, Gerhard; Mirabelli, Gioele; Gupta, Anshul; Boemmels, Juergen; Matagne, Philippe; Yakimets, Dmitry; Wu, Hao; Hou, Lei; Hellings, Geert; Liu, Changze

doi:10.1109/JEDS.2024.3498092

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Exploring GAA-Nanosheet, Forksheet and GAA-Forksheet Architectures: A TCAD-DTCO Study at 90 nm and 120-nm Cell Height

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2025

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https://doi.org/10.1109/JEDS.2024.3498092

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IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY

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22 since deposited on 2025-08-15

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Acq. date: 2026-01-06

Exploring GAA-Nanosheet, Forksheet and GAA-Forksheet Architectures: A TCAD-DTCO Study at 90 nm and 120-nm Cell Height

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