Publication:

Low temperature spike anneal for Ni-Silicide formation

Date

2004

Journal article

Simple item page Full metadata Statistics

Files

9277.pdf 1.13 MB

Author(s)

;

;

;

Chamirian, Oxana

;

Lindsay, Richard

;

de Potter de ten Broeck, Muriel

;

Demeurisse, Caroline

;

Vrancken, Christa

;

Journal

Microelectronic Engineering

Statistics

2001 since deposited on 2021-10-15

Acq. date: 2026-09-14