Publication:

Cleaning requirement in the thinning module for 3D-Stacked IC (3D-SIC) integration

Date

2010
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

21236.pdf 344.49 KB

Author(s)

Wostyn, Kurt  
;
Zhao, Ming  
;
Cui, Hushan
;
Laermans, Patrick  
;
Jourdain, Anne  
;
Verbinnen, Greet  
;
Struyf, Herbert  
;
De Strycker, Steven
;
Claes, Martine  
;
Travaly, Youssef
;
Leunissen, Peter

Journal

Abstract

Description

Statistics

Views

1941 since deposited on 2021-10-19
Acq. date: 2026-03-13

Citations

Statistics

Views

1941 since deposited on 2021-10-19
Acq. date: 2026-03-13

Citations