Publication:

Characterization of ultra thin oxynitrides: a general approach

Date

2000
Journal article
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Author(s)

Brijs, Bert
;
Deleu, Jeroen
;
Conard, Thierry  
;
De Witte, Hilde
;
Vandervorst, Wilfried  
;
Nakajima, K.
;
Kimura, K.
;
Genchev, I.
;
Bermaier, A.
;
Goergens, L.
;
Neumaier, P.
;
Dollinger, G.
;
Döbeli, M.

Journal

Nuclear Instruments and Methods B

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