Publication:

Low temperature selective growth of Ga-doped and Ga-B co-doped germanium source/drain for PMOS devices

Date

2023
Journal article
https://doi.org/10.35848/1347-4065/acb1b9
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 1.16 MB
Accepted version 665.57 KB

Author(s)

Porret, Clément  
;
Rengo, Gianluca  
;
Ayyad, Mustafa  
;
Hikavyy, Andriy  
;
Rosseel, Erik  
;
Langer, Robert  
;
Loo, Roger  

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS

Abstract

Description

Statistics

Downloads

234 since deposited on 2023-02-20
16last month
4last week
Acq. date: 2026-02-28

Views

1240 since deposited on 2023-02-20
1last month
Acq. date: 2026-02-28

Citations

Statistics

Downloads

234 since deposited on 2023-02-20
16last month
4last week
Acq. date: 2026-02-28

Views

1240 since deposited on 2023-02-20
1last month
Acq. date: 2026-02-28

Citations