Publication:
FEG-TEM analysis of the effects of Ge segregation and germane flux on the Ge profile across nm-scale SiGe layers, grown by both MBE and CVD
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1910 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1910 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-10
Citations