Publication:
A parylene temporary packaging technique for MEMS wafer handling
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Acq. date: 2026-08-22
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2 since deposited on 2021-10-19
Acq. date: 2026-08-22
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1897 since deposited on 2021-10-19
4last month
3last week
Acq. date: 2026-08-22
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