Publication:

Raising oxide: nitride selectivity to aid in the CMP of shallow trench isolation type applications

Date

1997

Proceedings Paper

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Files

1999.pdf 171.77 KB

Author(s)

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Steckenrider, J. S.

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Ganeshkumar, S.

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Grillaert, Joost

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Acq. date: 2026-08-31