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Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu
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Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rajagopal, A.
;
Grégoire, C.
;
Lemaire, J. J.
;
Pireaux, J. J.
;
Baklanov, Mikhaïl
;
Vanhaelemeersch, Serge
;
Maex, Karen
;
Waeterloos, Joost
Journal
Journal of Vacuum Science and Technology B
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Acq. date: 2025-12-16
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1985
since deposited on 2021-10-14
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Acq. date: 2025-12-16
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Downloads
1
since deposited on 2021-10-14
Acq. date: 2025-12-16
Views
1985
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-16
Citations