Publication:

Strained c:Si0.55Ge0.45 with Embedded e:Si0.75Ge0.25 S/D IFQW SiGe-pFET for DRAM periphery applications

Date

2016

Journal article

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Author(s)

Ritzenthaler, Romain

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;

Witters, Liesbeth

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;

Spessot, Alessio

;

Caillat, Christian

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Hellings, Geert

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;

Aoulaiche, Marc

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;

;

Noh, Kyung Bong

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;

;

Collaert, Nadine

;

;

Horiguchi, Naoto

;

Journal

Materials Science in Semiconductor Processing

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