Publication:
Strained c:Si0.55Ge0.45 with Embedded e:Si0.75Ge0.25 S/D IFQW SiGe-pFET for DRAM periphery applications
Date
| dc.contributor.author | Ritzenthaler, Romain | |
| dc.contributor.author | Schram, Tom | |
| dc.contributor.author | Witters, Liesbeth | |
| dc.contributor.author | Mitard, Jerome | |
| dc.contributor.author | Spessot, Alessio | |
| dc.contributor.author | Caillat, Christian | |
| dc.contributor.author | Hellings, Geert | |
| dc.contributor.author | Eneman, Geert | |
| dc.contributor.author | Aoulaiche, Marc | |
| dc.contributor.author | Na, Hoon Joo | |
| dc.contributor.author | Son, Yunik | |
| dc.contributor.author | Noh, Kyung Bong | |
| dc.contributor.author | Fazan, Pierre | |
| dc.contributor.author | Lee, Sun Ghil | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.author | Mocuta, Anda | |
| dc.contributor.author | Horiguchi, Naoto | |
| dc.contributor.author | Thean, Aaron | |
| dc.contributor.imecauthor | Ritzenthaler, Romain | |
| dc.contributor.imecauthor | Schram, Tom | |
| dc.contributor.imecauthor | Witters, Liesbeth | |
| dc.contributor.imecauthor | Mitard, Jerome | |
| dc.contributor.imecauthor | Spessot, Alessio | |
| dc.contributor.imecauthor | Hellings, Geert | |
| dc.contributor.imecauthor | Eneman, Geert | |
| dc.contributor.imecauthor | Fazan, Pierre | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.imecauthor | Horiguchi, Naoto | |
| dc.contributor.imecauthor | Thean, Aaron | |
| dc.contributor.orcidimec | Ritzenthaler, Romain::0000-0002-8615-3272 | |
| dc.contributor.orcidimec | Schram, Tom::0000-0003-1533-7055 | |
| dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
| dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
| dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
| dc.date.accessioned | 2021-10-23T14:15:18Z | |
| dc.date.available | 2021-10-23T14:15:18Z | |
| dc.date.issued | 2016 | |
| dc.identifier.issn | 1369-8001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27220 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S1369800115300998 | |
| dc.source.beginpage | 255 | |
| dc.source.endpage | 258 | |
| dc.source.issue | 2 | |
| dc.source.journal | Materials Science in Semiconductor Processing | |
| dc.source.volume | 42 | |
| dc.title | Strained c:Si0.55Ge0.45 with Embedded e:Si0.75Ge0.25 S/D IFQW SiGe-pFET for DRAM periphery applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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