Authors

Ritzenthaler, Romain; Schram, Tom; Witters, Liesbeth; Mitard, Jerome; Spessot, Alessio; Caillat, Christian; Hellings, Geert; Eneman, Geert; Aoulaiche, Marc; Na, Hoon Joo; Son, Yunik; Noh, Kyung Bong; Fazan, Pierre; Lee, Sun Ghil; Collaert, Nadine; Mocuta, Anda; Horiguchi, Naoto; Thean, Aaron

ISSN

1369-8001

Issue

2

Journal

Materials Science in Semiconductor Processing

Volume

42

Title

Strained c:Si0.55Ge0.45 with Embedded e:Si0.75Ge0.25 S/D IFQW SiGe-pFET for DRAM periphery applications

Publication type

Journal article