Publication:
High-performance (EOT<0.4nm, Jg~10-7A/cm2) ALD-deposited Ru\SrTiO3 stack for next generations DRAM pillar capacitor
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2181 since deposited on 2021-10-26
7last month
Acq. date: 2026-06-05
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Statistics
Views
2181 since deposited on 2021-10-26
7last month
Acq. date: 2026-06-05
Citations