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Role of defects in the reliability of HfO2/Si-based spacer dielectric stacks for local interconnects
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1992 since deposited on 2021-10-27
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Acq. date: 2025-10-24
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Metrics
Views
1992 since deposited on 2021-10-27
419item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations