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Feasibility of unzipping polymer polyphthalaldehyde for extreme ultraviolet lithography
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Authors
Rathore, Ashish
;
Pollentier, Ivan
;
Kumar, Sunkuru S.
;
De Simone, Danilo
;
De Gendt, Stefan
DOI
10.1117/1.JMM.20.3.034602
ISSN
1932-5150
Issue
3
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
Volume
20
Title
Feasibility of unzipping polymer polyphthalaldehyde for extreme ultraviolet lithography
Publication type
Journal article
Embargo date
2022-12-31
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2
20.500.12860/37470.2
*
2023-01-19T13:55:27Z
validation by library/open access desk
1
20.500.12860/37470
2021-11-02T15:55:45Z
*Selected version
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