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Enabling UTBB Strained SOI Platform for Co-integration of Logic and RF: Implant-Induced Strain Relaxation and Comb-like Device Architecture
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Authors
Sun, Chen
;
Liang, Jie
;
Xu, Haiwen
;
Kong, Eugene
;
Nguyen, Bich-Yen
;
Vandooren, Anne
;
Schwarzenbach, Walter
;
Maleville, Christophe
;
Barral, Vincent
;
Berthelon, Remy
;
Weber, Olivier
;
Arnaud, Franck
;
Thean, Aaron V. Y.
;
Gong, Xiao
EISBN
978-1-7281-6460-1
ISSN
0743-1562
Conference
IEEE Symposium on VLSI Technology and Circuits
Journal
na
Title
Enabling UTBB Strained SOI Platform for Co-integration of Logic and RF: Implant-Induced Strain Relaxation and Comb-like Device Architecture
Publication type
Proceedings paper
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3
20.500.12860/37756.3
*
2022-01-27T11:59:33Z
validation by library/open access desk
2
20.500.12860/37756.2
2021-11-17T17:34:04Z
validation by imec author
1
20.500.12860/37756
2021-11-02T15:59:26Z
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