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Accurate Measurements of Small Resistances in Vertical Interconnects with Small Aspect Ratios
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Authors
Stucchi, Michele
;
Fodor, Ferenc
;
Marinissen, Erik Jan
EISBN
978-1-7281-4312-5
ISSN
1530-1877
Conference
25th IEEE European Test Symposium (ETS)
Journal
na
Title
Accurate Measurements of Small Resistances in Vertical Interconnects with Small Aspect Ratios
Publication type
Proceedings paper
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2
20.500.12860/38202.2
*
2022-01-05T11:33:11Z
validation by library/open access desk
1
20.500.12860/38202
2021-11-02T16:05:16Z
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