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Mechanical stability of airgaps in nano-interconnects
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Authors
Vanstreels, Kris
;
Zahedmanesh, Houman
;
Gonzalez, Mario
DOI
10.1016/j.microrel.2020.113597
ISSN
0026-2714
Issue
na
Journal
MICROELECTRONICS RELIABILITY
Volume
107
Title
Mechanical stability of airgaps in nano-interconnects
Publication type
Journal article
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2
20.500.12860/38310.2
*
2021-11-26T11:20:53Z
validation by library/open access desk
1
20.500.12860/38310
2021-11-02T16:06:49Z
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