Authors

Joshi, Abhijeet; Rengo, Gianluca; Porret, Clément; Lin, Kun-Lin; Chang, Chia-He; Basol, Bulent

ISSN

na

Conference

239th ECS Meeting: G01: Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11

Journal

ECS Meeting Abstracts

Title

Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)

Publication type

Meeting abstract