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Improving tomographic sensing of Scalpel SPM with multi-probe functionality and automatic removal rate extraction
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Authors
O'Sullivan, C.
;
Tedaldi, M.
;
Humphris, A. D. L.
;
Hole, J. P.
;
Goulden, J.
;
Drilakis, Christos
;
Hantschel, Thomas
;
Celano, Umberto
DOI
10.1109/IPFA53173.2021.9617432
EISBN
978-1-6654-3988-6
ISSN
1946-1550
Conference
IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
Journal
na
Title
Improving tomographic sensing of Scalpel SPM with multi-probe functionality and automatic removal rate extraction
Publication type
Proceedings paper
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2
20.500.12860/39694.2
*
2022-05-03T10:09:31Z
validation by library/open access desk
1
20.500.12860/39694
2022-04-28T02:12:48Z
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