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Low-loss, low-temperature PVD SiN waveguides

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Authors
Golshani, Negin; Witters, Thomas; McGurk, John; De Heyn, Peter; De Coster, Jeroen; Milenin, Alexey; Thiam, Arame; Mingardi, Andrea; Verheyen, Peter; Pantouvaki, Marianna; Van Campenhout, Joris
DOI
10.1109/GFP51802.2021.9673874
EISBN
978-1-6654-2224-6
ISSN
1949-2081
Conference
17th IEEE International Conference on Group IV Photonics (GFP)
Title
Low-loss, low-temperature PVD SiN waveguides
Publication type
Proceedings paper
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120.500.12860/39792*2022-05-12T02:18:46Z

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