Browsing by author "Witters, Thomas"
Now showing items 1-20 of 86
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21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
Vega Gonzalez, Victor; Wilson, Chris; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Versluijs, Janko; Blanco, Victor; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Lesniewska, Alicja; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Pardons, Katrien; Barla, Kathy; Tokei, Zsolt (2019) -
3D integration challenges for fine pitch back side micro-bumping on ZoneBOND™ wafers
Buisson, Thibault; De Preter, Inge; Suhard, Samuel; Vandersmissen, Kevin; Jaenen, Patrick; Witters, Thomas; Jamieson, Geraldine; Jourdain, Anne; Van Huylenbroeck, Stefaan; La Manna, Antonio; Beyer, Gerald; Beyne, Eric (2012) -
A Dy2O3-capped HfO2 dielectric and TaCx-based metals enabling low-Vt single-metal-single-dielectric gate stack
Chang, Vincent; Ragnarsson, Lars-Ake; Pourtois, Geoffrey; O'Connor, Robert; Adelmann, Christoph; Van Elshocht, Sven; Delabie, Annelies; Swerts, Johan; Van der Heyden, Nikolaas; Conard, Thierry; Cho, Hag-Ju; Akheyar, Amal; Mitsuhashi, Riichirou; Witters, Thomas; O'Sullivan, Barry; Pantisano, Luigi; Rohr, Erika; Lehnen, Peer; Kubicek, Stefan; Schram, Tom; De Gendt, Stefan; Absil, Philippe; Biesemans, Serge (2007) -
A novel CBRAM integration using subtractive dry-etching process of Cu enabling high-performance memory scaling down to 10nm node
Redolfi, Augusto; Goux, Ludovic; Jossart, Nico; Yamashita, Fumiko; Nishimura, Eiichi; Urayama, Daisuke; Fujimoto, Kiwamu; Witters, Thomas; Lazzarino, Frederic; Jurczak, Gosia (2015) -
ALD barrier deposition on porous low-k dielectric materials for interconnects
Van Elshocht, Sven; Delabie, Annelies; Dewilde, Sven; Meersschaut, Johan; Swerts, Johan; Tielens, Hilde; Verdonck, Patrick; Witters, Thomas; Vancoille, Eric (2011-10) -
Aqueous chemical solution deposition and characterization of ultrathin high-k dielectric metal oxide films
Hardy, An; Van Elshocht, Sven; Van Bael, Marlies; D'Haen, Jan; Douheret, Olivier; De Gendt, Stefan; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; Witters, Thomas; D'Olieslaeger, Marc; Heyns, Marc; Mullens, J (2007) -
Aqueous chemical solution deposition of ultrathin high-k dielectric metal oxide films
Hardy, An; Van Elshocht, Sven; Van Bael, Marlies; D'Haen, Jan; Douheret, O.; De Gendt, Stefan; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; Witters, Thomas; D'Olieslaeger, Marc; Heyns, Marc; Mullens, J. (2007) -
Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films
Hardy, An; Van Elshocht, Sven; D'Haen, Jan; Douheret, Olivier; De Gendt, Stefan; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; Witters, Thomas; Bender, Hugo; Richard, Olivier; Heyns, Marc; D'Olieslaeger, Marc; Van Bael, Marlies; Mullens, J. (2007) -
Aqueous chemical solution deposition: a fast screening method for alternative high-k materials applied to Nd2O3 as a case study
Van Elshocht, Sven; Hardy, An; Witters, Thomas; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Franquet, Alexis; Richard, Olivier; Van Bael, Marlies; Mullens, J.; Heyns, Marc (2007) -
Atomistic investigation of the electronic structure, thermal properties and conduction defects in Ge-rich GexSe1-x materials for selector applications
Clima, Sergiu; Govoreanu, Bogdan; Opsomer, Karl; Velea, Alin; Avasarala, Naga Sruti; Devulder, Wouter; Shlyakhov, I.; Donadio, Gabriele Luca; Witters, Thomas; Kundu, Shreya; Goux, Ludovic; Afanasiev, Valeri; Kar, Gouri Sankar; Pourtois, Geoffrey (2017) -
Beyond BEOL interconnect wafer level monolithic near-infrared/infrared thin film photo diode image sensor integration
Li, Yunlong; Cheyns, David; Moreno Hagelsieb, Luis; Georgitzikis, Epimitheas; Lim, Myung jin; Mao, Ming; Witters, Thomas; Leyssens, Kenny; Boulenc, Pierre; Lee, Jiwon; Malinowski, Pawel; Guerrieri, Stefano (2019) -
Bulk properties of MOCVD-deposited HfO2 layers for high-k dielectric applications
Van Elshocht, Sven; Baklanov, Mikhaïl; Brijs, Bert; Carter, R.; Caymax, Matty; Carbonell, Laure; Claes, Martine; Conard, Thierry; Cosnier, Vincent; Date, Lucien; De Gendt, Stefan; Kluth, J.; Pique, Didier; Richard, Olivier; Vanhaeren, Danielle; Vereecke, Guy; Witters, Thomas; Zhao, Chao; Heyns, Marc (2004) -
Carbon-based liner for RESET current reduction in self-heating phase-change memory cells
De Proft, Anabel; Garbin, Daniele; Donadio, Gabriele Luca; Hody, Hubert; Witters, Thomas; Lodewijks, Kristof; Rottenberg, Xavier; Goux, Ludovic; Delhougne, Romain; Kar, Gouri Sankar (2020) -
Characterization by GISAXS and electrochemical impedance spectroscopy of porous oxide films
Huanca, Danilo; Verdonck, Patrick; Dias, Carlos; Petersen Barbosa Lima, Lucas; Van Elshocht, Sven; dos Santos, Sebastiao; Witters, Thomas (2018) -
Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams
Uedono, Akira; Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Witters, Thomas; Conard, Thierry; Baklanov, Mikhaïl; Van Elshocht, Sven; Oshima, Nagayasu; Suzuki, Ryoichi (2013) -
Chemisorption of ALD precursors in and on porous low-k films
Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Farrell, Leo; Baklanov, Mikhaïl; Tielens, Hilde; Van Besien, Els; Witters, Thomas; Nyns, Laura; Van Elshocht, Sven (2013) -
Compositional depth profiling of TaCN thin films
Adelmann, Christoph; Conard, Thierry; Franquet, Alexis; Brijs, Bert; Munnik, Frans; Burgess, Simon; Witters, Thomas; Meersschaut, Johan; Kittl, Jorge; Vandervorst, Wilfried; Van Elshocht, Sven (2012) -
Degradation mechanism of amorphous IGZO-based bipolar metal-semiconductor-metal selectors
Ravsher, Taras; Fantini, Andrea; Vaisman Chasin, Adrian; Houshmand Sharifi, Shamin; Hody, Hubert; Dekkers, Harold; Witters, Thomas; Van Houdt, Jan; Afanas'ev, Valeri; Couet, Sebastien; Kar, Gouri Sankar (2022) -
Direct evidence of the overshoot suppression in Ta2O5-based resistive switching memory with an integrated access resistor
Fan, Jimmy; Zhang, Leqi; Crotti, Davide; Witters, Thomas; Jurczak, Gosia; Govoreanu, Bogdan (2015) -
Effect of postdeposition anneal conditions on defect density of HfO2 layers measured by wet etching
Claes, Martine; De Gendt, Stefan; Witters, Thomas; Kaushik, Vidya; Conard, Thierry; Zhao, Chao; Manabe, Y.; Delabie, Annelies; Röhr, Erika; Chen, Jerry; Tsai, Wilman; Heyns, Marc (2004)