Authors
Das, Sayantan;
Sah, Kaushik;
Liang, Ardis;
Roy, Hemanta;
Tran, Kha;
Babu, Binesh;
Hegde, Arjun;
Cross, Andrew;
Leray, Philippe;
Halder, Sandip
EISBN
978-1-5106-4553-0
ISBN
978-1-5106-4552-3
ISSN
0277-786X
Conference
International Conference on Extreme Ultraviolet Lithography
Journal
Proceedings of SPIE
Volume
11854
Title
Deep learning-based defect detection using large FOV SEM for 28 nm pitch BEOL layer patterned with 0.33NA single exposure EUV
Publication type
Proceedings paper