Browsing Conference contributions by imec author "1b6675dcecae5d271edb0ab348b65df4f7bf1902"
Now showing items 1-12 of 12
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300 mm wafer development for pattern collapse evaluations
Xu, XiuMei; Tao, Zheng; Saib, Mohamed; Sebaai, Farid; Van de Kerkhove, Jeroen; Vrancken, Nandi; Vereecke, Guy; Holsteyns, Frank (2018) -
300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
Moussa, Alain; Bogdanowicz, Janusz; Groven, Benjamin; Morin, Pierre; Beggiato, Matteo; Saib, Mohamed; Santoro, G.; Abramovitz, Y.; Houchens, K.; Ben Nissim, S.; Meir, N.; Hung, J.; Urbanowicz, A.; Koret, R.; Turovets, I.; Lorusso, Gian; Charley, Anne-Laure (2023) -
Advanced characterization of 2D materials using SEM image processing and machine learning
Saib, Mohamed; Moussa, Alain; Beggiato, Matteo; Groven, Benjamin; Medina Silva, Henry; Morin, Pierre; Bogdanowicz, Janusz; Kar, Gouri Sankar; Charley, Anne-Laure (2024) -
Cu Pad Surface Height Evaluation Technique by In-line SEM for Wafer Hybrid Bonding
Kasai, Hiroaki; Osaki, Mayuka; Hasumi, Kazuhisa; Mise, Nobuyuki; Tanaka, Maki; Tunca Altintas, Bensu; Chew, Soon Aik; Bogdanowicz, Janusz; Moussa, Alain; Saib, Mohamed; Zhang, Boyao; Charley, Anne-Laure (2024) -
Localized power spectral density analysis on atomic force microscopy images for advanced patterning applications
Moussa, Alain; Saib, Mohamed; Paolillo, Sara; Lazzarino, Frederic; Illiberi, Andrea; Maes, Jan; Deng, Shaoren; Charley, Anne-Laure; Leray, Philippe (2019) -
Massive metrology and inspection solution for EUV by area inspection SEM with machine learning technology
Kondo, Tsuyoshi; Ban, N.; Ebizuka, Y.; Toyoda, Y.; Yamada, Y.; Kashiwa, T.; Koike, H.; Shindo, H.; Charley, Anne-Laure; Saib, Mohamed; Van Roey, Frieda; De Bisschop, Peter; De Simone, Danilo; Beral, Christophe; Lorusso, Gian (2021) -
Metrology of Thin Resist for High NA EUVL
Lorusso, Gian; Beral, Christophe; Bogdanowicz, Janusz; De Simone, Danilo; Hasan, Mahmudul; Jehoul, Christiane; Moussa, Alain; Saib, Mohamed; Zidan, Mohamed; Severi, Joren; Truffert, Vincent; Van Den Heuvel, Dieter; Goldenshtein, Alex; Houchens, Kevin; Santoro, Gaetano; Fischer, Daniel; Muellender, Angelika; Hung, Joey; Koret, Roy; Turovets, Igor; Ausschnitte, Kit; Mack, Chris; Kondo, Tsuyoshi; Shohjoh, Tomoyasu; Ikota, Masami; Charley, Anne-Laure; Leray, Philippe (2022) -
Multivariate analysis methodology for the study of massive multidimensional SEM data
Saib, Mohamed; Lorusso, Gian; Charley, Anne-Laure; Leray, Philippe; Kondo, Tsuyoshi; Kawamoto, Yuta; Ebizuka, Yasushi; Ban, Naoma (2021) -
Printability and propagation of stochastic defects through a study o defects programmed on EUV mask
Das, Poulomi; Moussa, Alain; Beral, Christophe; Gupta, Mihir; Saib, Mohamed; Halder, Sandip; Charley, Anne-Laure; Leray, Philippe (2021) -
Regularized Autoencoder for The Analysis of Multivariate Metrology Data
Saib, Mohamed; Lorusso, Gian; Charley, Anne-Laure; Leray, Philippe; Kondo, Tsuyoshi; Shindo, Hiroyuki; Ebizuka, Yasushi; Ban, Naoma; Ikota, Masami (2022) -
Review-SEM image analysis with K-means algorithm
Halder, Sandip; Cerbu, Dorin; Saib, Mohamed; Leray, Philippe (2018) -
Scatterometry and AFM measurement combination for area selective deposition process characterization
Saib, Mohamed; Moussa, Alain; Charley, Anne-Laure; Leray, Philippe; Hung, Joey; Koret, Roy; Turovets, Igor; Ger, Avron; Deng, Shaoren; Illiberi, Andrea; Maes, Jan Willem; Woodworth, Gabriel; Strauss, Michael (2019)