Browsing Conference contributions by imec author "4442aac1b8e11224b1cf806f63e5edb2bcbe9e5b"
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An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films
Levrau, Elisabeth; Devloo-Casier, K; Dendooven, Jolien; Verdonck, Patrick; Baklanov, Mikhaïl; Detavernier, Christoph (2013) -
Sealing of low-k dielectric (k=2.0) with self-assembled monolayers (SAMs) for the atomic layer deposition (ALD) of TiN
Sun, Yiting; Levrau, Elisabeth; Blauw, Michiel; Meersschaut, Johan; Verdonck, Patrick; Struyf, Herbert; Detavernier, Chrostophe; Baklanov, Mikhaïl; De Feyter, Steven; Armini, Silvia (2013) -
Stuffing-enabled confinement of self-assembled monolayer used as sealing agent on plasma-exposed 2.0 p-OSG films
Sun, Yiting; Levrau, Elisabeth; Zhang, Liping; Geypen, Jef; Franquet, Alexis; Le, Quoc Toan; de Marneffe, Jean-Francois; Bender, Hugo; Struyf, Herbert; Baklanov, Mikhaïl; Detavernier, Christophe; De Feyter, Steven; Armini, Silvia (2014) -
Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium
Vandenbroucke, Sofie; Levrau, Elisabeth; Minjauw, Matthias; Solano Minuesa, Eduardo; Van de Kerckhove, Kevin; Devloo-Casier, Kilian; Pulinthanathu Sree, Sreeprasant; Martens, Johan A.; Vos, Rita; Jans, Karolien; Dendooven, Jolien; Vereecken, Philippe; Stakenborg, Tim; Detavernier, Christophe (2019)