Browsing Conference contributions by author "Saad, Yves"
Now showing items 1-4 of 4
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Calibrated Modeling of Line-to-Line Dielectric Reliability: LER Specs to Meet Reliability Constraints at Operating Conditions
Ciofi, Ivan; Roussel, Philippe; Saad, Yves; Melvin, Lawrence; Wilson, Chris; Croes, Kristof (2019) -
Impact of litho-patterning variations on the electrical performance and variability of advanced interconnects
Ciofi, Ivan; Roussel, Philippe; Baert, Rogier; Kocaay, Deniz; Contino, Antonino; Croes, Kristof; Saad, Yves; Gao, Weimin; Moroz, Victor; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt (2018) -
Modeling EUVL patterning variability for metal layers in 5nm technology node and its effect on electrical resistance
Gao, Weimin; Blanco, Victor; Philipsen, Vicky; Kamohara, Itaru; Saad, Yves; Ciofi, Ivan; Melvin, Lawrence; Hendrickx, Eric; Wiaux, Vincent; Kim, Ryan Ryoung han (2017) -
Patterning process exploration of metal 1 layer in 7nm node with 3D pattering flow simulations
Gao, Weimin; Ciofi, Ivan; Saad, Yves; Matagne, Philippe; Bachman, Michael; Oulmane, Mohamed; Gillijns, Werner; Lucas, Kevin; Demmerle, Wolfgang; Schmoeller, Thomas (2015)