Browsing Conference contributions by imec author "c6459acb9293e7645212f63485826367fe4a859b"
Now showing items 1-4 of 4
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Characterization and integration of a new Si-O-C film deposited by CVD
Alves Donaton, Ricardo; Struyf, Herbert; Lepage, Muriel; Coenegrachts, Bart; Stucchi, Michele; De Roest, David; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen; Gaillard, F.; Xia, L. Q.; Lim, T. H.; Gotuaco, M.; Yieh, E.; Van Autryve, Luc (2001) -
Development of an SBT MOCVD production process for FERAM applications
Everaert, Jean-Luc; Bartic, Andrei; Kaczer, Ben; Wouters, Dirk; Monchoix, Hervé; Mitaut, Christian; Van Autryve, Luc; Pavano, Rita; Casella, Patrizia; Zambrano, R. (2001) -
Electrical properties of MOCVD HfO2 dielectric layers with polysilicon gate electrodes for CMOS applications
Date, Lucien; Rittersma, Chris; Massoubre, D.; Ponomarev, Youri; Roozeboom, F.; Pique, Didier; Van Autryve, Luc; Van Elshocht, Sven; Caymax, Matty (2003) -
Use of a purged FOUP to improve H-terminated silicon surface stability prior to epitaxial growth
Wostyn, Kurt; Rondas, Dirk; Kenis, Karine; Loo, Roger; Hikavyy, Andriy; Douhard, Bastien; Mertens, Paul; Holsteyns, Frank; De Gendt, Stefan; D'Urzo, Lucia; Van Autryve, Luc (2014)