Recently added

Today's scorecard for tomorrow's photoresist: progress and outlook towards High-NA EUV lithography

Santaclara, Jara G; Rispens, Gijsbert; Bekaert, Joost; Thiam, Arame; Maslow, Mark; Hoefnagels, Rik; Zuurbier, Nadia; van Lent, Lidia; Fong Choi, Yin (2021)

Multivariate analysis methodology for the study of massive multidimensional SEM data

Saib, Mohamed; Lorusso, Gian; Charley, Anne-Laure; Leray, Philippe; Kondo, Tsuyoshi; Kawamoto, Yuta; Ebizuka, Yasushi; Ban, Naoma (2021)

Defect characterization of EUV Self-Aligned Litho-Etch Litho-Etch (SALELE) patterning scheme for advanced nodes

Sah, Kaushik; Cross, Andrew; Das, Sayantan; Blanco, Victor; Kljucar, Luka; Halder, Sandip; Leray, Philippe (2021)

Gate module study for performance improvement in vertical GaN device

Ruzzarin, Maria; Geens, Karen; Borga, Matteo; Liang, Hu; You, Shuzhen; Bakeroot, Benoit; Decoutere, Stefaan; De Santi, Carlo; Meneghini, Matteo; Meneghesso, Gaudenzio; Zanoni, Enrico (2021)

Human-Robot Collaboration (HRC) technologies for reducing Work-related Musculoskeletal Diseases in industry 4.0

Ranavolo, Alberto; Draicchio, Francesco; Silvetti, Alessio; Varrecchia, Tiwana; Helen Rosen, Patricia; Wischniewski, Sascha; Albrecht, Philipp; Bianchi, Matteo; Cherubini, Andrea; Fritzsche, Lars; Sartori, Massimo; Vanderborght, Bram; Govaerts, Renée; Ajoudani, Arash (2021)

Semantic descriptor for intelligence services

Ramos, E.; Schneider, T.; Montpetit, M.-J.; De Meester, Ben (2021)

How to measure and support engagement for optimal learning experience?

Raes, Annelies; Heutte, Jean (2021-05)

Plasma impact on the HfO2 high-k dielectric: Continuous-Wave plasma etch versus Quasi-Atomic Layer etch

Radisic, Dunja; Smets, Quentin; Schram, Tom (2021)

Systematic analysis of randomization-based protected cache architectures

Purnal, Antoon; Giner, Lukas; Gruss, Daniel; Verbauwhede, Ingrid (2021)

High Aspect Ratio Supervia Dual Damascene etch for iN5 and beyond

Puliyalil, Harinarayanan; Feurprier, Yannick; Oikawa, Noriaki; Vega Gonzalez, Victor; Briggs, Basoene; Montero Alvarez, Daniel; Lazzarino, Frederic; Tokei, Zsolt; Satoru, Nakamura; Tahara, Shigeru; Kumar, Kaushik (2021)

Strain-related peculiarities of B incorporation in epitaxial Si1-xGex source/drain materials and their impact on electrical properties

Porret, Clément; Rengo, Gianluca; Hikavyy, Andriy; Rosseel, Erik; Ayyad, Mustafa; Morris, Richard; Vantomme, Andre; Loo, Roger (2021)

Extended carrier lifetime in epitaxial Ge-on-Nothing virtual substrates

Porret, Clément; Depauw, Valerie; Han, Han; Srinivasan, Ashwyn; Loo, Roger (2021)

How to be algorithmically governed like that: data- and algorithmic-agency from user perspective

Pop Stefanija, Ana; Pierson, Jos (2021)

Electroless Rhodium Deposition for Metallization of Advanced Interconnects

Philipsen, Harold; Viviani, Prisca (2021)

A Deep Convolutional Framelet Network based on Tight steerable Wavelet: application to sparse-view medical tomosynthesis

Pereira, Luis F. Alves; Van Nieuwenhove, Vincent; De Beenhouwer, Jan; Sijbers, Jan (2021-10)

Challenges and solutions of replacement metal gate patterning to enable gate-all-around device scaling

Oniki, Yusuke; Ragnarsson, Lars-Ake; Hideaki, Iino; Cott, Daire; Chan, BT; Sebaai, Farid; Hopf, Toby; Dekkers, Harold; Dentoni Litta, Eugenio; Altamirano Sanchez, Efrain; Holsteyns, Frank; Horiguchi, Naoto (2021)

Enhanced light coupling into nanostructured arrays as an enabler for advanced Raman-based metrology

Nuytten, Thomas; Bogdanowicz, Janusz; Gawlik, Andrzej; Oniki, Yusuke; Kenis, Karine; Muraki, Yusuke; Charley, Anne-Laure; Fleischmann, Claudia; De Wolf, Ingrid; van der Heide, Paul (2021)

Global Is the New Local: FPGA Architecture at 5nm and Beyond

Nikolic, Stefan; Tokei, Zsolt; Catthoor, Francky; Lenne, Paolo (2021)

Comparison of MR acquisition strategies for super-resolution reconstruction using the Bayesian Mean Squared Error

Nicastro, Michele; Jeurissen, Ben; Beirinckx, Quinten; Smekens, Céline; Poot, D. H. J.; Sijbers, Jan; den Dekker, Arnold (2021-10)

Defining the Business Ecosystem of Peer-to-Peer Electricity Trading

Montakhabi, Mehdi; Van Der Graaf, Shenja; Ballon, Pieter; Walravens, Nils; Van Haverbeke, Wim (2021)

Conference contributions: Recent submissions

Today's scorecard for tomorrow's photoresist: progress and outlook towards High-NA EUV lithography ﻿

Multivariate analysis methodology for the study of massive multidimensional SEM data ﻿

Defect characterization of EUV Self-Aligned Litho-Etch Litho-Etch (SALELE) patterning scheme for advanced nodes ﻿

Gate module study for performance improvement in vertical GaN device ﻿

Human-Robot Collaboration (HRC) technologies for reducing Work-related Musculoskeletal Diseases in industry 4.0 ﻿

Semantic descriptor for intelligence services ﻿

How to measure and support engagement for optimal learning experience? ﻿

Plasma impact on the HfO2 high-k dielectric: Continuous-Wave plasma etch versus Quasi-Atomic Layer etch ﻿

Systematic analysis of randomization-based protected cache architectures ﻿

High Aspect Ratio Supervia Dual Damascene etch for iN5 and beyond ﻿

Strain-related peculiarities of B incorporation in epitaxial Si1-xGex source/drain materials and their impact on electrical properties ﻿

Extended carrier lifetime in epitaxial Ge-on-Nothing virtual substrates ﻿

How to be algorithmically governed like that: data- and algorithmic-agency from user perspective ﻿

Electroless Rhodium Deposition for Metallization of Advanced Interconnects ﻿

A Deep Convolutional Framelet Network based on Tight steerable Wavelet: application to sparse-view medical tomosynthesis ﻿

Challenges and solutions of replacement metal gate patterning to enable gate-all-around device scaling ﻿

Enhanced light coupling into nanostructured arrays as an enabler for advanced Raman-based metrology ﻿

Global Is the New Local: FPGA Architecture at 5nm and Beyond ﻿

Comparison of MR acquisition strategies for super-resolution reconstruction using the Bayesian Mean Squared Error ﻿

Defining the Business Ecosystem of Peer-to-Peer Electricity Trading ﻿