ISSN
1012-0394
Conference
16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023)
Journal
Solid State Phenomena Vol. 346
Research discipline
Materials science
Title
Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching
Publication type
Proceedings paper
Embargo date
9999-12-31