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Articles
Chemical mechanical polishing for indium bond pad damascene processing
Publication:
Chemical mechanical polishing for indium bond pad damascene processing
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Date
2024
Journal article
https://doi.org/10.35848/1347-4065/ad2135
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3.45 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ceulemans, Karl
;
Shafahian, Ehsan
;
Struyf, Herbert
;
Devriendt, Katia
;
Deckers, Steven
;
Heylen, Nancy
;
Derakhshandeh, Jaber
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
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165
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712
since deposited on 2024-03-02
Acq. date: 2025-12-18
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Metrics
Downloads
165
since deposited on 2024-03-02
29
last month
2
last week
Acq. date: 2025-12-18
Views
712
since deposited on 2024-03-02
Acq. date: 2025-12-18
Citations