EISBN
978-1-5106-7219-2
ISBN
978-1-5106-7218-5
ISSN
0277-786X
Conference
Conference on Novel Patterning Technologies
Journal
Proceedings of SPIE
Volume
12956
Title
Studies on resolution with ZEP530A for EUV mask
Publication type
Proceedings paper
Embargo date
2024-04-09