Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers

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Authors
Van Damme, Jacques; Massar, Shana; Acharya, Rohith; Ivanov, Tsvetan; Perez Lozano, Daniel; Canvel, Yann; Demarets, Mael; Vangoidsenhoven, Diziana; Hermans, Yannick; Lai, J. G.; Ananthapadmanabha Rao, Vadiraj; Mongillo, Massimo; Wan, Danny; De Boeck, Jo; Potocnik, Anton; De Greve, Kristiaan
DOI
10.1038/s41586-024-07941-9
ISSN
0028-0836
PMID
MEDLINE:39294381
Issue
8032
Journal
NATURE
Volume
634
Title
Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers
Publication type
Journal article
Embargo date
2024-09-18
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220.500.12860/44631.2*2025-07-09T12:50:42Zvalidation by library/open access desk
120.500.12860/446312024-10-12T18:13:36Z

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