Browsing Articles by imec author "586f7f629f4fb861a335b76c2785495a360a95ad"
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Buried power rail integration with FinFETs for ultimate CMOS scaling
Gupta, Anshul; Varela Pedreira, Olalla; Arutchelvan, Goutham; Zahedmanesh, Houman; Devriendt, Katia; Hanssen, Frederik; Tao, Zheng; Ritzenthaler, Romain; Wang, Shouhua; Radisic, Dunja; Kenis, Karine; Teugels, Lieve; Sebaai, Farid; Lorant, Christophe; Jourdan, Nicolas; Chan, BT; Subramanian, Sujith; Schleicher, Filip; Hopf, Toby; Peter, Antony; Rassoul, Nouredine; Debruyn, Haroen; Demonie, Ingrid; Siew, Yong Kong; Chiarella, Thomas; Briggs, Basoene; Zhou, Daisy; Rosseel, Erik; De Keersgieter, An; Capogreco, Elena; Dentoni Litta, Eugenio; Boccardi, Guillaume; Baudot, Sylvain; Mannaert, Geert; Bontemps, Noemie; Sepulveda Marquez, Alfonso; Mertens, Sofie; Kim, Min-Soo; Dupuy, Emmanuel; Vandersmissen, Kevin; Paolillo, Sara; Cousserier, Joris; Yakimets, Dmitry; Lazzarino, Frederic; Chehab, Bilal; Favia, Paola; Drijbooms, Chris; Jaysankar, Manoj; Morin, Pierre; Altamirano Sanchez, Efrain; Mitard, Jerome; Wilson, Chris; Holsteyns, Frank; Boemmels, Juergen; Demuynck, Steven; Tokei, Zsolt; Horiguchi, Naoto (2020) -
Cobalt and Ruthenium drift in ultra-thin oxides
Tierno, Davide; Varela Pedreira, Olalla; Wu, Chen; Jourdan, Nicolas; Kljucar, Luka; Tokei, Zsolt; Croes, Kristof (2019) -
Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications
Swerts, Johan; Popovici, Mihaela Ioana; Kaczer, Ben; Aoulaiche, Marc; Redolfi, Augusto; Clima, Sergiu; Caillat, Cristian; Wang, W.C.; Afanasiev, Valeri; Jourdan, Nicolas; Hody, Hubert; Olk, Christina; Van Elshocht, Sven; Jurczak, Gosia (2014) -
Plasma enhanced chemical vapor deposition of manganese on low-k dielectrics for copper diffusion barrier application
Jourdan, Nicolas; Barbarin, Yohan; Croes, Kristof; Siew, Yong Kong; Van Elshocht, Sven; Tokei, Zsolt; Vancoille, Eric (2013) -
Study of chemical vapor deposition of manganese on porous SiCOH low-k dielectrics using Bis(ethylcyclopentadienyl)manganese
Jourdan, Nicolas; Krishtab, Mikhail; Baklanov, Mikhaïl; Meersschaut, Johan; Wilson, Chris; Ablett, J.; Fonda, E.; Zhao, Larry; Van Elshocht, Sven; Tokei, Zsolt; Vancoille, Eric (2012)