Browsing Articles by imec author "5d18d0b8555376d05523aa0bd338318b7c6556c2"
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Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
Verdonck, Patrick; De Roest, David; Kaneko, Shinya; Caluwaerts, Rudy; Tsuji, Naoto; Matsushita, Kiyohiro; Kemeling, Nathan; Travaly, Youssef; Sprey, Hessel; Schaekers, Marc; Beyer, Gerald (2007) -
Dielectric reliability of 70 nm pitch air-gap interconnect structures
Pantouvaki, Marianna; Sebaai, Farid; Kellens, Kristof; Goossens, Danny; Vereecke, Bart; Versluijs, Janko; Van Besien, Els; Caluwaerts, Rudy; Marrant, Koen; Bender, Hugo; Moussa, Alain; Struyf, Herbert; Beyer, Gerald (2011) -
Dry oxidation mechanisms of copper in trenches
Carbonell, Laure; Ratchev, Petar; Caluwaerts, Rudy; Van Hove, Marleen; Verlinden, B.; Maex, Karen (2002) -
Electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Kashiwagi, Yusaku; Teugels, Lieve; Caluwaerts, Rudy; Chiodarelli, Nicolo; Vereecken, Philippe; Beyer, Gerald; Heyns, Marc; De Gendt, Stefan; Tokei, Zsolt (2013) -
Materials characterization of WNxCy, WNx and WCx films for advanced barriers
Volders, Henny; Tokei, Zsolt; Bender, Hugo; Brijs, Bert; Caluwaerts, Rudy; Carbonell, Laure; Conard, Thierry; Drijbooms, Chris; Franquet, Alexis; Garaud, Sylvain; Hoflijk, Ilse; Li, Wei-Min; Moussa, Alain; Sinapi, Fabrice; Sprey, Hessel; Travaly, Youssef; Vanhaeren, Danielle; Vereecke, Guy (2007) -
Microwave Properties of Ba-Substituted Pb(Zr0.52Ti0.48)O3 after Chemical Mechanical Polishing
Luciano, Federica; Teugels, Lieve; McMitchell, Sean; Talmelli, Giacomo; Guerenneur, Anais; Stheins, Renzo; Caluwaerts, Rudy; Conard, Thierry; Vaesen, Inge; Sergeant, Stefanie; Van Dorpe, Pol; De Gendt, Stefan; Dekkers, Matthijn; Swerts, Johan; Ciubotaru, Florin; Adelmann, Christoph (2023) -
Scaling down thickness of ULK materials for 65 node and below and its efect on electrical performance
Fruhauf, S.; Himcinschi, C.; Rennau, M.; Schulze, K.; Schulz, S.E.; Friedrich, M.; Gessner, T.; Zahn, D.R.T.; Le, Quoc Toan; Caluwaerts, Rudy (2005) -
Ultra-low copper baths for sub-35 nm copper interconnects
Atanasova, Tanya; Carbonell, Laure; Caluwaerts, Rudy; Tokei, Zsolt; Strubbe, Katrien; Vereecken, Philippe (2013)