Browsing Articles by imec author "c30f16620323628cf391d29809be5c5894e1ab9e"
Now showing items 1-6 of 6
-
Attenuated phase shift masks: an interview with Andreas Erdmann
Gallagher, Emily (2022-12-28) -
Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment
Timmermans, Marina; Pollentier, Ivan; Korytov, Maxim; Nuytten, Thomas; Sergeant, Stefanie; Conard, Thierry; Meersschaut, Johan; Zhang, Yide; Dialameh, Masoud; Alaerts, Wilfried; Jazaeri, Ehsan; Spampinato, Valentina; Franquet, Alexis; Brems, Steven; Huyghebaert, Cedric; Gallagher, Emily (2021) -
Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures
Bekaert, Joost; Gallagher, Emily; Jonckheere, Rik; Van Look, Lieve; Aubert, Remko; Klein, Alexander; Yegen, Gokay; Broman, Par; Nair, Vineet Vijayakrishnan; Timmermans, Marina; Pollentier, Ivan; Hendrickx, Eric (2021-05-27) -
Enhanced Thermal Conductivity of Free-Standing Double-Walled Carbon Nanotube Networks
Mehew, Jake Dudley; Timmermans, Marina; Saleta Reig, David; Sergeant, Stefanie; Sledzinska, Marianna; Chavez-Angel, Emigdio; Gallagher, Emily; Sotomayor Torres, Clivia M.; Huyghebaert, Cedric; Tielrooij, Klaas-Jan (2023) -
EUV scattering from carbon nanotube pellicles: measurement and control
Pollentier, Ivan; Luttgenau, Bernard; Brose, Sascha; Timmermans, Marina; Huyghebaert, Cedric; Brems, Steven; Gallagher, Emily (2021) -
Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging
Mochi, Iacopo; Timmermans, Marina; Gallagher, Emily; Mariano, Marina; Pollentier, Ivan; Rajendran, Rajeev; Helfenstein, Patrick; Fernandez, Sara; Kazazis, Dimitrios; Ekinci, Yasin (2019)