Browsing Articles by imec author "dad84bd55aa56c5d70a38a4651c7e4f0937470d4"
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A simplified method for (circular) transmission line model simulation and ultralow contact resistivity extraction
Yu, Hao; Schaekers, Marc; Schram, Tom; Collaert, Nadine; De Meyer, Kristin; Horiguchi, Naoto; Thean, Aaron; Barla, Kathy (2014) -
Contact resistivities of metal-insulator-semiconductor contacts and metal-semiconductor contacts
Yu, Hao; Schaekers, Marc; Barla, Kathy; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron; De Meyer, Kristin (2016) -
Defect engineering for shallow n-type junctions in germanium: facts and fiction
Simoen, Eddy; Schaekers, Marc; Liu, Jinbiao; Luo, Jun; Zhao, Chao; Barla, Kathy; Collaert, Nadine (2016) -
Demonstration of direction dependent conduction through MoS2 films prepared by tunable mass transport fabrication
Chiappe, Daniele; Mongillo, Massimo; Asselberghs, Inge; El Kazzi, Salim; Caymax, Matty; Barla, Kathy; De Gendt, Stefan; Radu, Iuliana; Huyghebaert, Cedric (2016) -
First demonstration of vertically stacked gate-all-around highly strained germanium nanowire pFETs
Capogreco, Elena; Witters, Liesbeth; Arimura, Hiroaki; Sebaai, Farid; Porret, Clément; Hikavyy, Andriy; Loo, Roger; Milenin, Alexey; Eneman, Geert; Favia, Paola; Bender, Hugo; Wostyn, Kurt; Dentoni Litta, Eugenio; Schulze, Andreas; Vrancken, Christa; Opdebeeck, Ann; Mitard, Jerome; Langer, Robert; Holsteyns, Frank; Waldron, Niamh; Barla, Kathy; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2018-11) -
Heteroepitaxy of InP on Si(001) in sub-50nm width trenches by Selective-Area Metalorganic Vapor-Phase Epitaxy: the role of the nucleation layer and the recess engineering
Merckling, Clement; Waldron, Niamh; Jiang, Sijia; Guo, Weiming; Collaert, Nadine; Caymax, Matty; Vancoille, Eric; Barla, Kathy; Thean, Aaron; Heyns, Marc; Vandervorst, Wilfried (2014-01) -
III/V nano ridge structures for optical applications on patterned 300mm silicon substrate
Kunert, Bernardette; Guo, Weiming; Mols, Yves; Tian, Bin; Wang, Zhechao; Shi, Yuting; Van Thourhout, Dries; Pantouvaki, Marianna; Van Campenhout, Joris; Langer, Robert; Barla, Kathy (2016) -
InGaAs gate-all-around nanowire devices on 300mm substrates
Waldron, Niamh; Merckling, Clement; Teugels, Lieve; Ong, Patrick; Ibrahim, Ansar; Sebaai, Farid; Pourghaderi, Mohammad Ali; Barla, Kathy; Collaert, Nadine; Thean, Aaron (2014) -
Layer-controlled epitaxy of 2D semiconductors: bridging nanoscale phenomena to wafer-scale uniformity
Chiappe, Daniele; Ludwig, Jonathan; Leonhardt, Alessandra; El Kazzi, Salim; Nalin Mehta, Ankit; Nuytten, Thomas; Celano, Umberto; Sutar, Surajit; Pourtois, Geoffrey; Caymax, Matty; Paredis, Kristof; Vandervorst, Wilfried; Lin, Dennis; De Gendt, Stefan; Barla, Kathy; Huyghebaert, Cedric; Asselberghs, Inge; Radu, Iuliana (2018) -
Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: Impact of reducing agents
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; De Gendt, Stefan; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015) -
Low-resistance titanium contacts and thermally unstable nickel germanide contacts on p-type germanium
Yu, Hao; Schaekers, Marc; Schram, Tom; Aderhold, Wolfgang; Mayur, Abilash; Mitard, Jerome; Witters, Liesbeth; Barla, Kathy; Collaert, Nadine; Horiguchi, Naoto; Thean, Aaron; De Meyer, Kristin (2016) -
Multi-ring circular transmission line model for ultralow contact resistivity extraction
Yu, Hao; Schaekers, Marc; Schram, Tom; Rosseel, Erik; Martens, Koen; Demuynck, Steven; Horiguchi, Naoto; Barla, Kathy; Collaert, Nadine; De Meyer, Kristin; Thean, Aaron (2015) -
New bending mode in SAQP Si fins and its mitigation
Sepulveda Marquez, Alfonso; Hellin, David; Zhang, Liping; Kenis, Karine; Batuk, Dmitry; Baudot, Sylvain; Briggs, Basoene; Mountsier, Tom; Barla, Kathy; Morin, Pierre; Altamirano Sanchez, Efrain (2022) -
Nucleation behavior of III/V crystal selectively grown inside nano-trenches: the influence of trench width
Jiang, Sijia; Merckling, Clement; Moussa, Alain; Waldron, Niamh; Caymax, Matty; Vandervorst, Wilfried; Collaert, Nadine; Barla, Kathy; Langer, Robert; Thean, Aaron; Seefeldt, Marc; Heyns, Marc (2015) -
Replacement fin processing for III-V on Si: From FinFets to nanowires
Waldron, Niamh; Merckling, Clement; Teugels, Lieve; Ong, Patrick; Sebaai, Farid; Barla, Kathy; Collaert, Nadine; Thean, Aaron (2016) -
Selective metal-organic chemical vapor deposition growth of high quality GaAs on Si(001)
Guo, Weiming; Date, Lucien; Pena, Vanessa; Bao, X.; Merckling, Clement; Waldron, Niamh; Collaert, Nadine; Caymax, Matty; Sanchez, E.; Vancoille, Eric; Barla, Kathy; Thean, Aaron; Eyben, Pierre; Vandervorst, Wilfried (2014) -
Self-aligned double patterning process for subtractive Ge Fin fabrication at 45-nm pitch
Milenin, Alexey; Witters, Liesbeth; Barla, Kathy; Thean, Aaron (2016) -
Strained germanium gate-all-around pMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
Witters, Liesbeth; Arimura, Hiroaki; Sebaai, Farid; Hikavyy, Andriy; Milenin, Alexey; Loo, Roger; De Keersgieter, An; Eneman, Geert; Schram, Tom; Wostyn, Kurt; Devriendt, Katia; Schulze, Andreas; Lieten, Ruben; Bilodeau, S; Cooper, E; Storck, Peter; Chiu, Eddy; Vrancken, Christa; Favia, Paola; Vancoille, Eric; Mitard, Jerome; Langer, Robert; Opdebeeck, Ann; Holsteyns, Frank; Waldron, Niamh; Barla, Kathy; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2017) -
Thermal stability concern of metal-insulator-semiconductor contact: a case study of Ti/TiO2/n-Si contact
Yu, Hao; Schaekers, Marc; Schram, Tom; Demuynck, Steven; Horiguchi, Naoto; Barla, Kathy; Collaert, Nadine; Thean, Aaron; De Meyer, Kristin (2016) -
Titanium silicide on Si:P with precontact amorphization implantation treatment: contact resistivity approaching 1×10-9 Ohm-cm²
Yu, Hao; Schaekers, Marc; Peter, Antony; Pourtois, Geoffrey; Rosseel, Erik; Lee, Joon-Gon; Song, Woo-Bin; Shin, Keo Myoung; Everaert, Jean-Luc; Chew, Soon Aik; Demuynck, Steven; Kim, Daeyong; Barla, Kathy; Mocuta, Anda; Horiguchi, Naoto; Thean, Aaron; Collaert, Nadine; De Meyer, Kristin (2016)