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New bending mode in SAQP Si fins and its mitigation
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Authors
Sepulveda Marquez, Alfonso
;
Hellin, David
;
Zhang, Liping
;
Kenis, Karine
;
Batuk, Dmitry
;
Baudot, Sylvain
;
Briggs, Basoene
;
Mountsier, Tom
;
Barla, Kathy
;
Morin, Pierre
;
Altamirano Sanchez, Efrain
DOI
10.1016/j.mssp.2021.106437
ISSN
1369-8001
Issue
April
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume
141
Title
New bending mode in SAQP Si fins and its mitigation
Publication type
Journal article
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2
20.500.12860/41852.2
*
2023-06-20T13:55:22Z
validation by library/open access desk
1
20.500.12860/41852
2023-06-20T10:34:30Z
*Selected version
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