Browsing Presentations by imec author "4fe93ec5f1ee5c84df79a850485b973ec41d19e5"
Now showing items 1-20 of 35
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3D analysis of intermetallic formation in blankets and micro-bumps.
Spampinato, Valentina; Franquet, Alexis; Barnes, Jean-Paul; Conard, Thierry (2019) -
Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool
Spampinato, Valentina; Dialameh, Masoud; Fleischmann, Claudia; Franquet, Alexis; Vandervorst, Wilfried; van der Heide, Paul (2018) -
Advanced characterization of nanometer size structures by TOFSIMS
Franquet, Alexis (2019) -
ALD strontium titanates and their characterization
Popovici, Mihaela Ioana; Van Elshocht, Sven; Tomida, Kazuyuki; Menou, Nicolas; Swerts, Johan; Pawlak, Malgorzata; Kaczer, Ben; Kim, Min-Soo; Brijs, Bert; Favia, Paola; Conard, Thierry; Franquet, Alexis; Moussa, Alain; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge (2010) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; van Bael, M.K.; Blomberg, T.; Pieereux, D.; Swerts, J.; Maes, J.W.; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2008) -
An alternative application of ToF-SIMS/in-situ AFM: controlled sample preparation for IC failure analysis
Franquet, Alexis; Spampinato, Valentina; Khaled, Ahmad; Conard, Thierry; Brand, Sebastian; Kogel, M; Wiesler, I; De Wolf, Ingrid (2019) -
Atomic layer deposition of Ru thin films using the zero-valence precursor EBECH Ru
Adelmann, Christoph; Popovici, Mihaela Ioana; Groven, Benjamin; Moens, Kristof; Meersschaut, Johan; Franquet, Alexis; Swerts, Johan; Delabie, Annelies; Van Elshocht, Sven (2014) -
Characterization of grain boundaries and impact of plasma-induced patterned in 2D materials
Celano, Umberto; Virkki, Olli; Chiappe, Daniele; Heyne, Markus; Hoflijk, Ilse; Franquet, Alexis; Huyghebaert, Cedric; Paredis, Kristof; De Gendt, Stefan; Radu, Iuliana; Vandervorst, Wilfried (2017) -
Characterization of post-etch photoresists used in metal hardmask and photoresist mask patterning schemes
Kesters, Els; Claes, Martine; Lux, Marcel; Le, Quoc Toan; Vereecke, Guy; Franquet, Alexis; Conard, Thierry; Mertens, Paul; Adriaensens, Peter; Carleer, Robert; Biebuyck, J.J.; Van Veltem, P.; Bebelman, Sabine (2007) -
Correlative Analysis in The Semiconductor Industry
Larson, D; Prosa, T; Martin, I; Merkulov, A; Robbes, A; Dulac, O; Bernier, N; Delaye, V; Franquet, Alexis; van der Heide, Paul; Spampinato, Valentina; Vandervorst, Wilfried (2019) -
Cu alloys for conductive bridging memories as studied by C-AFM
Celano, Umberto; Goux, Ludovic; Opsomer, Karl; Conard, Thierry; Franquet, Alexis; Jurczak, Gosia; Vandervorst, Wilfried (2012) -
Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns
Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Briggs, Basoene; Hody, Hubert; Spampinato, Valentina; Franquet, Alexis; Chan, BT; Delabie, Annelies (2019) -
First electrical demonstration of DRAM compatible Ni silicides
Machkaoutsan, Vladimir; Bauer, Matthias; Zhang, Y.; Koelling, Sebastian; Franquet, Alexis; Vanormelingen, Koen; Verheyen, Peter; Loo, Roger; Kim, Chul Sung; Lauwers, Anne; Hoffmann, Thomas Y.; Absil, Philippe; Granneman, Ernst; Vandervorst, Wilfried; Thomas, Shawn. G (2009) -
Formation of self-organized nanodots on GaN surface by Ar-ion implantation
Som, Tapobrata; Pereira, L.; Skeren, T.; Demeulemeester, J.; Franquet, Alexis; Temst, K.; Vantomme, Andre (2010) -
Ge chemical vapor deposition on GaAs and In0.53Ga0.47As for low resistivity ohmic III-V nMOSFETs source/drain contacts
Vincent, Benjamin; Firrincieli, Andrea; Waldron, Niamh; Wang, W.-E.; Franquet, Alexis; Douhard, Bastien; Bender, Hugo; Vandervorst, Wilfried; Loo, Roger; Caymax, Matty (2011) -
In-situ ToF-SIMS and SFM measurements of inorganic semiconductor materials
Franquet, Alexis; Spampinato, Valentina; Conard, Thierry; Mollers, Rudolf; Niehuis, Ewald; Vandervorst, Wilfried (2016) -
Interface formation in rare-earth oxide containing advanced gate stacks
Adelmann, Christoph; Ferain, Isabelle; Franquet, Alexis; Conard, Thierry; Witters, Thomas; Richard, Olivier; Bender, Hugo; Meersschaut, Johan; Kittl, Jorge; Van Elshocht, Sven (2008) -
Interfacial reactions and phase stabilization of doped hafnia and higher-k oxides: the added value of GATR-FTIR
Hardy, An; Adelmann, Christoph; Van Elshocht, Sven; Favia, Paola; Bender, Hugo; Franquet, Alexis; Van den Rul, Heidi; Van Bael, Marlies; D'Haen, Jan; De Gendt, Stefan; D'Olieslaeger, Marc; Heyns, Marc; Kittl, Jorge; Detavernier, Christophe; Mullens, Jules (2009) -
Material-selective doping of 2D TMDC through AlxOy encapsulation
Leonhardt, Alessandra; Chiappe, Daniele; El Kazzi, Salim; Afanasiev, Valeri; Conard, Thierry; Franquet, Alexis; Huyghebaert, Cedric; De Gendt, Stefan (2019) -
New possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometry
Kayser, Sven; Pirkl, Alexander; Zakel, Julia; Franquet, Alexis; Spampinato, Valentina (2020)