Authors

Caymax, Matty; Poortmans, Jef; Van Ammel, Annemie; Libezny, Milan; Nijs, Johan; Mertens, Robert

Issue

1_2

Journal

Thin Solid Films

Volume

241

Title

Low temperature selective growth of epitaxial Si and Si1-xGex layers from SiH4 and GeH4 in an ultrahigh vacuum, very low pressure chemical vapour deposition reactor: kinetics and possibilities

Publication type

Journal article

Embargo date

9999-12-31