Browsing by Author "Blavier, G."
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Publication Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with other established techniques
Journal article2000, Journal of the Electrochemical Society, (147) 2, p.751-755Publication Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with RBS and SIMS
Proceedings paper1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.170-179Publication Impact of dummy metal structures on post oxide CMP planarization
Proceedings paper1999, 4th International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC, 11/02/1999, p.413-416Publication In-line and nondestructive analysis of selectively grown epitaxial Si1-xGex and Si/Si1-xGex layers by spectroscopic ellipsometry and comparison with other established techniques
Proceedings paper2001, In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II; 1 June 2001; Edinburgh,Publication In-line and nondestructive analysis of selectively grown epitaxial Si1-xGex and Si/Si1-xGex layers by spectroscopic ellipsometry and comparison with other established techniques
Oral presentation2001, KLA-Tencor Yield Management Seminar (YMS); April 25 2001; München, Germany.