Browsing by Author "Boeckx, Carolien"
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Publication Controlling placement error and dimensional variability in templated DSA
Meeting abstract2016, Chemical Research in Flanders, 24/10/2016Publication EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes
Proceedings paper2016, Extreme Ultraviolet (EUV) Lithography VII, 21/02/2016, p.97761WPublication Impact of template shape on CDU and pattern placement for grapho-epitaxy DSA
Proceedings paper2016, DSA Symposium, 11/10/2016Publication Impact of template shape on pattern placement and CDU for grapho-epitaxy DSA
Proceedings paper2016, DSA Symposium, 11/10/2016Publication LCDU and placement improvement of contacts using EUV templated DSA
Oral presentation2018, SPIE 2018Publication Next generation of decision making software for nanopatterns metrology: application to semiconductor industry
Proceedings paper2016, Metrology, Inspection, and Process Control for Microlithography XXX, 21/02/2016, p.977836Publication Opportunities and challenges for DSA in logic and memory
Meeting abstract2016, SPIE Advanced Lithography Conference, 21/02/2016, p.9777-25Publication Process optimization and improvement of contact hole CDU and pattern placement with grapho-epitaxy DSA with EUV patterned templates
Boeckx, CarolienProceedings paper2017, Electron, Ion, and Photon Beam Technology and Nanofabrication, 30/05/2017Publication Process optimization and variability improvement of contacts using grapho-epitaxy DSA
Proceedings paper2017, 3rd DSA Symposium, 17/09/2017Publication Templated DSA with EUV-exposed pre-patterns
Proceedings paper2016, Chemical Research in Flanders, 24/10/2016Publication Towards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patterns
Proceedings paper2015, 1st International Symposium on DSA, 25/10/2015Publication Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)
Proceedings paper2015, 1st International Symposium on DSA, 26/10/2015