Browsing by Author "Casella, P."
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Publication Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors
Journal article2005, Journal of the Electrochemical Society, (152) 12, p.C865-C869Publication Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
Oral presentation2004, International Symposium on Integrated FerroelectricsPublication Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology
Journal article2004, Physica Status Solidi C, (1) S1, p.S78-S82Publication Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology
Journal article2004, Integrated Ferroelectrics, 66, p.71-83Publication Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
Oral presentation2004, The 16th International Symposium on Integrated FerroelectricsPublication Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutions
Oral presentation2004, E-MRS Spring Meeting Symposium D: Functional Oxides for Advanced Semiconductor TechnologiesPublication Spacers alternatives for integration of 3D stacked SBT FeCAPs
Journal article2003, Integrated Ferroelectrics, 53, p.257-267