Browsing by Author "Catana, Gabriela"
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Publication Contamination control for the 32nm node
Journal article2008, Semiconductor Fabtech, 37, p.79-85Publication From SPC to APC at IMEC's pilot line: modeling the thermal oxide growth using multiple regression analysis
Publication Implementation of a system for metal contamination control based on classification criteria
Proceedings paper2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.259-262Publication Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study
Proceedings paper2004, Proceedings of the International Symposium on Semiconductor Manufacturing - ISSM, 27/09/2004, p.53-56Publication Wafer backside cleaning strategies for high-k/metal gate processing
; ; ; ; Kraus, HaraldOral presentation2004, 7th International Symposium Ultra-clean Processing of Silicon - UCPSSPublication Wafer backside cleaning strategies for high-k/metal gate processing
; ; ; ; Kraus, HaraldProceedings paper2005, Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium, 20/09/2004, p.241-244