Browsing by Author "Di Lorenzo, Paolo"
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Publication Co-optimization of lithographic and patterning processes for improved EPE performance
Publication SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform
Proceedings paper2017, Extreme Ultraviolet (EUV) Lithography VIII, 27/02/2017, p.101430HPublication Study of design-based e-beam defect inspection for hotspot detection and process window characterization on 10nm logic device
Proceedings paper2016, Metrology, Inspection, and Process Control for Microlithography XXX, 20/02/2016, p.97780OPublication The imec iN7 EUV platform: M2-Block and Via patterning developments
Proceedings paper2016, International Symposium on Extreme Ultraviolet Lithography - EUVL, 24/10/2016