Browsing by Author "Edrisi, Arash"
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Publication Characterization of optical material properties for alternative EUV mask absorber materials
Proceedings paper2016, European Mask and Lithography Conference - EMLC, 21/06/2016Publication Evaluation of optical material parameters for advanced absorbers on EUV masks
Oral presentation2016, International Symposium on Extreme Ultraviolet Lithography - EUVLPublication Mitigating EUV mask 3D effects by alternative metal absorbers
Proceedings paper2016, International Symposium on Extreme Ultraviolet Lithography - EUVL, 24/10/2016Publication Optimized EUV mask absorber stack for improved imaging by reducing roughness and crystallinity of alternative absorber materials
Proceedings paper2016, International Symposium on Extreme Ultraviolet Lithography, 24/10/2016Publication Reducing EUV mask 3D effects by alternative metal absorbers
; ; ; ; Evanschitzky, PeterJournal article2017, Journal of Micro/Nanolithography MEMS and MOEMS, (16) 4, p.41002