Browsing by Author "Eitoku, Atsuro"
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Publication Advanced wafer surface cleaning technology
Oral presentation2004, SEMICON Korea 2004 STS, S5: Contamination-free Manufacturing SeminarPublication Application of single-wafer wet cleaning prior to epitaxial SiGe process
Journal article2009, Solid State Phenomena, 145-146, p.173-176Publication Cleaning of nanoparticles in semiconductor manufacturing
Oral presentation2004, BePCIS Seminar on Selected Topics in NanotechnologyPublication Damage clustering and damage-size distributions after megasonic cleaning
Proceedings paper2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.87-93Publication Damage review on gate stack test structures after high-velocity aerosol cleaning
; ; ; Janssens, TomProceedings paper2007, Sematech Surface Preparation and Cleaning Conference, 25/04/2007Publication Influences of oxide loss on contamination removal
Oral presentation2004, 7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Influences of oxide loss on contamination removal
Proceedings paper2005, Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium, 20/09/2004, p.177-180Publication New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2058Publication Removal of small (<100-nm) particles and metal contamination in single-wafer cleaning tool
Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.157-161Publication Selective wet etching of Hf-based layers
Oral presentation2004, Sematech Wafer Clean & Surface Prep ConferencePublication Single-wafer wet cleaning for a high particle removal efficiency on hydrophobic surface
Proceedings paper2005, Cleaning Technology in Semiconductor Device Manufacturing IX, 16/10/2005, p.134-141Publication State-of-the art cleaning in semiconductor manufacturing
Oral presentation2003, 3rd International Workshop on New Trends in Laser Cleaning