Browsing by Author "Erofeev, Ivan"
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Publication Controlled and Uniform Wet Etching of Molybdenum Nanowires
Publication Controlled Stepwise Wet Etching of Polycrystalline Mo Nanowires
Journal article2024, ADVANCED FUNCTIONAL MATERIALS, (34) 12, p.Art. 2310838Publication Digital Etching of Molybdenum Interconnects Using Plasma Oxidation
Publication Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions
Journal article2024, SMALL, (20) 51, p.Art. 2406713Publication Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching
Proceedings paper2023-08, 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 2023, p.346-350Publication Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits
Journal article2024, ADVANCED ELECTRONIC MATERIALS, (10) 9, p.Art. 2400035