Browsing by Author "Fischer, P."

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Controlling scratching in Cu chemical Journalmechanical planarization

Eusner, T.
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Saka, N.
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Chun, J.H.
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Armini, Silvia
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Moinpour, M.
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Fischer, P.
Journal article
2009, Journal of the Electrochemical Society, (156) 7, p.H528-H534
Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications

Pawlak, Malgorzata
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Menou, Nicolas
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Wang, Xin Peng
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Dilliway, G.
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Pierreux, D.
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Fischer, P.
Oral presentation
2008, MRS Spring Meeting Symposium H: Materials Science of High-k Dielectric Stacks
Effect of deposition and anneal temperature on batch-ALD deposited ZrO2/Al2O3/ZrO2 films for DRAM MIM capacitor applications

Dilliway, G.
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Pierreux, D.
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Fischer, P.
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Menou, Nicolas
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Pawlak, Malgorzata
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Wang, Xin Peng
Proceedings paper
2008, 8th International Conference on Atomic Layer Deposition - ALD, 29/06/2008
High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed

Druais, Gael
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Dilliway, G.
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Fischer, P.
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Guidotti, E.
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Luhn, Ole
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Radisic, Alex
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Zahraoui, S.
Journal article
2008, Microelectronic Engineering, (85) 10, p.1957-1961
High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed

Druais, Gael
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Dilliway, Gabriela
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Fischer, P.
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Guidotti, E.
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Bureau, C.
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Palmans, Roger
Meeting abstract
2008, 17th Workshop Materials for Advanced Metallization, 2/03/2008, p.43-44
High-k dielectrics and metal gates for future generation memory devices

Kittl, Jorge
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Opsomer, Karl
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Popovici, Mihaela Ioana
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Menou, Nicolas
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Kaczer, Ben
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Wang, Xin Peng
Proceedings paper
2009, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-based CMOS. 5: New Materials, Processing, and Equipment, 24/05/2009, p.29-40