Browsing by Author "Froyen, L."
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Publication A new approach for the measurement of resistivity and cross-sectional area of an aluminium interconnect line: principle and applications
Proceedings paper1998, Advanced Metallization and Interconnect Systems for ULSI Applications in 1997, 30/09/1997, p.197-204Publication Analyses of post metal etch cleaning in downstream H2O-based plasma followed by a wet chemistry
; ; ; Froyen, L.Journal article1999, J. Electrochem. Soc., (146) 10, p.3843-3851Publication Characterization and barrier properties for Cu metallization of tungsten nitride deposited by PECVD using WF6 +N2 +H2
Proceedings paper1999, Advanced Metallization Conference in 1998 - AMC 1998, 6/10/1998, p.297-303Publication Characterization and barrier properties for Cu metallization of tungsten nitride deposited by PECVD using WF6+N2+H2
Oral presentation1998, Advanced Metallization Conference; October 1998;Publication Characterization of WF6/N2/H2 plasma enhanced chemical vapor deposited WxN films as barriers for Cu metallization
Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.242-251Publication Comparison of the electromigration behavior of Al(MgCu) with Al(Cu) and Al(SiCu)
Proceedings paper1998, Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits, 13/04/1998, p.133-138Publication Evaluation of post metal etch cleaning by analyzing chemical compositions and distributions
; ; ; Froyen, L.Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Evaluation of post metal etch cleaning by analyzing chemical compositions and distributions
; ; ; Froyen, L.Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.177-180Publication Gaseous impurities in Co silicidation - impact and solutions
Journal article2001, Journal of the Electrochemical Society, (148) 6, p.G344-G354Publication Interaction of Ti capped Co thin film with Si3N4
; ; ; Publication Segregation of Cu on etched and non-etched Al(Cu) surface
Proceedings paper1998, Materials Reliability in Microelectronics VIII, 13/04/1998, p.77-82Publication Synthesis and mechanical and tribological characterization of alumina-yttria stabilized zirconia (YSZ) nanocomposites with YSZ synthesized by means of an aqueous solution-gel method or a hydrothermal route
Publication Thermal desorption issues related to silicidation and back-end metallization
; ; ; ; Froyen, L.Oral presentation1999, Advanced Metallization Conference; 28-30 September 1999; Orlando, FL, USA.Publication Thermal desorption issues related to silicidation and back-end metallization
; ; ; ; Froyen, L.Proceedings paper2000, Advanced Metallization Conference 1999 - AMC 1999, 28/09/1999, p.577-581